Photoresist Chemicals 4-Pentyn-2-ol,5-[(5S,6R)-6-[[[(1,1-dimethylethyl)diphenylsilyl]oxy]methyl]tetrahydro-2-methoxy-5-methyl-2H-pyran-2-yl]-1-[(4-methoxyphenyl)methoxy]-3-methyl-, methanesulfonate, (2R,3S)- Cas:872591-73-6 Molecular Formula:C39H52O8SSi