Photoresist Chemicals 4-Piperidinecarboxylic acid, 1-[5-[[[4-(4-chloro-2-thienyl)-5-[[(2S)-2-methyl-1-pyrrolidinyl]methyl]-2-thi azolyl]amino]carbonyl]-3-fluoro-2-pyridinyl]- Cas:832087-63-5 Molecular Formula:C25H27ClFN5O3S2