Photoresist Chemicals 4-Thia-1-azabicyclo[3.2.0]heptane-2-carboxylicacid, 3,3-dimethyl-7-oxo-6-[(2-phenylacetyl)amino]- (2S,5R,6R)-,(acetyloxy)methyl ester Cas:983-85-7 Molecular Formula:C19H22 N2 O6 S