Photoresist Chemicals 5-Benzofurancarboxamide, 2,3-dihydro-N-[2-[(trans-4-hydroxycyclohexyl)amino]-4-pyrimidinyl]-N-[3- (2-methyl-1-piperidinyl)propyl]- Cas:849749-74-2 Molecular Formula:C28H39N5O3