Photoresist Chemicals 5-Heptenoic acid, 7-[4-[3-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-1-octenyl]tetrahydro-5-meth yl-2-oxo-3-furanyl]-, methyl ester Cas：64244-49-1 Molecular Formula：C27H48O5Si