Photoresist Chemicals 5-Isoxazolecarboxamide, N-[1-[[[(1R)-1-[3-chloro-5-(5-chloro-2-cyano-3-fluorophenyl)-2-pyridinyl] ethyl]amino]carbonyl]cyclopropyl]- Cas:669067-48-5 Molecular Formula:C22H16Cl2FN5O3