Photoresist Chemicals 5-Oxa-7,11-diaza-2-siladodecan-12-oic acid, 11-[(3,5-dibromophenyl)methyl]-2,2-dimethyl-6-oxo-, 1,1-dimethylethyl ester Cas：808102-88-7 Molecular Formula：C21H34Br2N2O4Si