Photoresist Chemicals 5-Pyrimidinecarboxylic acid, 1,2,3,6-tetrahydro-4-methyl-1-[3-[methyl(2-thienylsulfonyl)amino]propyl]- 6-(3-nitrophenyl)-2-oxo-, 1-methylethyl ester Cas:837427-28-8 Molecular Formula:C23H28N4O7S2