Photoresist Chemicals 5H-Tetrazol-5-one, 1-(4-chlorophenyl)-4-[(4,5-dihydro-5-thioxo-1,3,4-oxadiazol-2-yl)methyl]- 1,4-dihydro- Cas:928342-95-4 Molecular Formula:C10H7ClN6O2S