Photoresist Chemicals 64812-88-0 5-Heptenoic acid, 7-[5-oxo-3-[(tetrahydro-2H-pyran-2-yl)oxy]-1-cyclopenten-1-yl]-, Methyl ester, [3R-(Z)]- Cas:64812-88-0 Molecular Formula:C18H26O5