Photoresist Chemicals (6R,7R)-3-(acetyloxymethyl)-7-[[2-[(4-ethyl-2,3-dioxo-piperazine-1-carbonyl)amino]-2-phenyl-acetyl]amino]-8-oxo-5-thia-1-azabicyclo[4.2.0]oct-2-ene-2-carboxylic acid Cas:59723-81-8 Molecular Formula:C25H27N5O9S