Photoresist Chemicals 7(4H)-Benzothiazolone, 5,6-dihydro-5,5-dimethyl-2-[(3S)-3-[(2′-methyl[1,1′-biphenyl]-3-yl)methyl] -4-morpholinyl]- Cas:913717-41-6 Molecular Formula:C27H30N2O2S