Photoresist Chemicals Ethanone, 1-[(2S)-4-(4-chloro-2-fluoro-5-methoxyphenyl)-2-methyl-1-piperazinyl]-2- [3-(2-oxazolyl)-1H-pyrazolo[3,4-b]pyridin-1-yl]- Cas:918483-58-6 Molecular Formula:C23H22ClFN6O3