Photoresist Chemicals Carbamic acid, [(1R)-1-[(4-chlorophenyl)methyl]-2-oxo-2-[4-[tetrahydro-4-(2-methylprop yl)-2H-pyran-4-yl]-1-piperazinyl]ethyl]-, 1,1-dimethylethyl ester Cas:569653-92-5 Molecular Formula:C27H42ClN3O4