Photoresist Chemicals 4,16-Dioxa-3,17-disilanonadec-12-en-9-ol,17,17-diethyl-12-[(methoxymethoxy)methyl]-14-[(4-methoxyphenyl)methoxy]-2,6,7-trimethyl-3,3-bis(1-methylethyl)-15-[(triphenylmethoxy)methyl]-, methanesulfonate Cas:575439-18-8 Molecular Formula:C60H92O10SSi2