Photoresist Chemicals 1-Piperazinecarboxylic acid, 4-[2-[[(2R)-2,3-dihydroxypropyl]amino]-6-ethylthieno[2,3-d]pyrimidin-4-yl ]-, 1,1-dimethylethyl ester Cas：911224-62-9 Molecular Formula：C20H31N5O4S