Photoresist Chemicals Phosphonic acid, P-[2-[[2-[7-[(4-fluorophenyl)methyl]-4-hydroxy-3-[[(2-methoxyethyl)amino] carbonyl]-2-oxo-1,5-naphthyridin-1(2H)-yl]acetyl]amino]ethyl]-, diethyl ester Cas:925916-94-5 Molecular Formula:C27H34FN4O8P