Photoresist Chemicals 2-Thiophenecarboxylic acid, 5-[3-[(4R)-4-[[[(1,1-dimethylethyl)dimethylsilyl]oxy]methyl]dihydro-2-oxo- 2H-1,3-oxazin-3(4H)-yl]propyl]-, 1-methylethyl ester Cas:924301-17-7 Molecular Formula:C22H37NO5SSi