Photoresist Chemicals 5-Heptenoic acid, 7-[(1R,2S,3R)-2-[[[(butylamino)carbonyl]oxy]methyl]-3-[[(1,1-dimethyleth yl)dimethylsilyl]oxy]-5-oxocyclopentyl]-, methyl ester, (5Z)- Cas:847691-06-9 Molecular Formula:C25H45NO6Si