Photoresist Chemicals Acetamide, N-[[(5S)-3-[4-[(3S,4R)-3,4-dihydroxycyclohexyl]-3-fluorophenyl]-2-oxo-5- oxazolidinyl]methyl]-2,2-difluoro- Cas:847256-85-3 Molecular Formula:C18H21F3N2O5