Photoresist Chemicals Benzamide, 4-chloro-N-[[5-[[4-[(1,3-dihydro-2,2-dioxidobenzo[c]thien-5-yl)amino]-1- piperidinyl]sulfonyl]-2-thienyl]methyl]- Cas:848557-68-6 Molecular Formula:C25H26ClN3O5S3