Photoresist Chemicals Carbamothioic acid, [1-[3-chloro-4-[(dimethylamino)carbonyl]phenyl]-4,5-dihydro-3-(3-pyridin yl)-1H-pyrazolo[4,3-g]benzothiazol-7-yl]-, S-ethyl ester Cas:883863-03-4 Molecular Formula:C25H23ClN6O2S2