Photoresist Chemicals Phosphonic acid, [(3E)-4-[3-(1,1-dimethylethyl)-5,6,7,8-tetrahydro-4-hydroxy-1-naphthalen yl]-1-methyl-2-oxo-3-butenyl]-, diethyl ester Cas：676362-01-9 Molecular Formula：C23H35O5P