Photoresist Chemicals Benzamide, N-[(5-chloro-2-thienyl)sulfonyl]-4-[7-[[(5-ethyl-2-thienyl)methyl]amino]-1,4 -dihydro-2,4-dioxo-3(2H)-quinazolinyl]- Cas：849793-75-5 Molecular Formula：C26H21ClN4O5S3