Photoresist Chemicals Benzamide, 4-chloro-5-[[[[1-[[6-[2,6-dimethyl-4-(methylsulfonyl)phenoxy]-3-pyridinyl] methyl]-4-piperidinyl]pentylamino]carbonyl]amino]-2-fluoro-, hydrochloride Cas:880356-69-4 Molecular Formula:C33H41ClFN5O5S.xClH