Photoresist Chemicals Carbamic acid, [(1R,2S)-2-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-1-(hydroxymethyl)-2-(4- nitrophenyl)ethyl]-, 1,1-dimethylethyl ester, rel- Cas:878043-05-1 Molecular Formula:C20H34N2O6Si