Photoresist Chemicals 1,4-Benzenedicarboxylic acid, 1-[(dimethylphenylsilyl)difluoromethyl]-2,2,2-trifluoroethyl 2,2-difluoro-1-(trifluoromethyl)ethenyl ester Cas:832712-70-6 Molecular Formula:C22H16F10O4Si