Photoresist Chemicals Carbamic acid, dimethyl-, (3S,5R)-5-[[4-[[3-chloro-4-(2-pyridinylmethoxy)phenyl]amino]thieno[2,3- d]pyrimidin-6-yl]ethynyl]-3-pyrrolidinyl ester Cas:833478-12-9 Molecular Formula:C27H25ClN6O3S