Photoresist Chemicals 2-Furancarboxamide, N-[4,6-dimethoxy-2-(methylamino)-5-pyrimidinyl]-5-[(1,2,3,4-tetrahydro- 4,4,7-trimethyl-1,4-benzazasilin-6-yl)oxy]- Cas:827338-68-1 Molecular Formula:C23H29N5O5Si