Photoresist Chemicals Benzenesulfonamide, 4-fluoro-N-[4-[[(2R)-3-methoxy-2-[[(phenylamino)carbonyl]oxy]propyl][[(1 -methylethyl)amino]carbonyl]amino]butyl]-2-(trifluoromethyl)- Cas:929281-14-1 Molecular Formula:C26H34F4N4O6S