Photoresist Chemicals 3-Cyclohepten-1-one, 6-[(1E)-2-[[(1,1-dimethylethyl)dimethylsilyl]oxy]ethenyl]-3-[(dimethylphen ylsilyl)oxy]-5-methyl-, (5S,6S)- Cas:929208-52-6 Molecular Formula:C24H38O3Si2