Photoresist Chemicals Acetamide, 2-[(1,4,5,6,7,8-hexahydro-4-oxo[1]benzothieno[2,3-d]pyrimidin-2-yl)thio]-N-(5-methyl-3-isoxazolyl)- (9CI) Cas:606106-13-2 Molecular Formula:C16H16N4O3S2