Photoresist Chemicals Acetamide, 2-[3-[[4-[(3,4-dihydro-3-oxo-2H-1,4-benzothiazin-6-yl)amino]-5-fluoro-2- pyrimidinyl]amino]phenoxy]-N-methyl- Cas：841289-14-3 Molecular Formula：C21H19FN6O3S