Photoresist Chemicals Acetamide, N-[[(5S)-3-[3-fluoro-4-(1-oxido-1-thia-4,8-diazaspiro[4.5]dec-8-yl)phenyl ]-2-oxo-5-oxazolidinyl]methyl]- Cas:853796-31-3 Molecular Formula:C19H25FN4O4S