Photoresist Chemicals Acetic acid, [5-[[7-[(2,5-difluorophenyl)methyl]-7H-pyrrolo[2,3-d]pyrimidin-2-yl]amino] -2-[[[2-(2-hydroxyethoxy)ethyl]amino]carbonyl]phenoxy]-, methyl ester Cas:909564-41-6 Molecular Formula:C27H27F2N5O6