Photoresist Chemicals Aluminum,bis[29H,31H-phthalocyaninato(2-)-kN29,kN30,kN31,kN32][m-[1,1,3,3-tetraphenyl-1,3-disiloxanediolato(2-)-kO1:kO3]]di- Cas:81422-13-1 Molecular Formula:C88H52 Al2 N16 O3 Si2