Photoresist Chemicals Benzamide, 3-methoxy-N-(1-methyl-4-piperidinyl)-4-[[4-[(2,3,4,5-tetrahydro-5-oxo-1, 4-benzoxazepin-6-yl)amino]-5-(trifluoromethyl)-2-pyrimidinyl]amino]- Cas:878144-49-1 Molecular Formula:C28H30F3N7O4