Photoresist Chemicals Benzamide, 4-[2-chloro-4-[[5-[2-(2-hydroxyethoxy)ethyl]-5H-pyrrolo[3,2-d]pyrimidin-4 -yl]amino]phenoxy]-N-(1,1-dimethylethyl)-, monohydrochloride Cas:871028-59-0 Molecular Formula:C27H30ClN5O4.ClH