Photoresist Chemicals Benzamide, 4-[[7-[(2,5-difluorophenyl)methyl]-7H-pyrrolo[2,3-d]pyrimidin-2-yl]amino]- N-[2-(2-hydroxyethoxy)ethyl]-2-(1-methylethoxy)- Cas：909562-56-7 Molecular Formula：C27H29F2N5O4