Photoresist Chemicals Benzamide, 4-[[7-[(2,5-difluorophenyl)methyl]-7H-pyrrolo[2,3-d]pyrimidin-2-yl]amino]- N-(trans-4-hydroxycyclohexyl)-2-methoxy- Cas:909562-28-3 Molecular Formula:C27H27F2N5O3