Photoresist Chemicals Benzamide, N-[3-[[[(6-amino-4-pyrimidinyl)[3-(2-oxo-1-pyrrolidinyl)propyl]amino]carb onyl]amino]-4-methylphenyl]-3-(trifluoromethyl)- Cas:872512-28-2 Molecular Formula:C27H28F3N7O3