Photoresist Chemicals Benzamide, N-[5-(2-aminoethyl)-6-(3-chloro-2-thienyl)-4,5-dihydro-4-oxo-1H-pyrrolo[ 3,2-d]pyrimidin-7-yl]-, monohydrochloride Cas:846570-77-2 Molecular Formula:C19H16ClN5O2S.ClH