Photoresist Chemicals Benzenesulfonamide, 4-chloro-N-[5-chloro-2-(5-chloro-1,2,3,4-tetrahydro-2-oxo-4-quinazolinyl )-3-pyridinyl]-3-(trifluoromethyl)- Cas：926003-72-7 Molecular Formula：C20H12Cl3F3N4O3S