Photoresist Chemicals Benzenesulfonamide, 6-chloro-3-[[4-[[(1R)-2,2-dimethyl-1-(5-methyl-2-furanyl)propyl]amino]-1- oxido-1,2,5-thiadiazol-3-yl]amino]-2-hydroxy- Cas:681513-96-2 Molecular Formula:C18H22ClN5O5S2