Photoresist Chemicals Benzenesulfonamide, N-[1-[(2-chloro-4-fluorophenyl)methyl]-2,3-dihydro-3-oxo-1H-indazol-5-yl ]-4-fluoro-3-(trifluoromethyl)- Cas：879548-94-4 Molecular Formula：C21H13ClF5N3O3S