Photoresist Chemicals Benzenesulfonamide,2-chloro-N-[[[4-methoxy-6-[[(tetrahydro-2H-pyran-2-yl)oxy]methyl]-1,3,5-triazin-2-yl]amino]carbonyl]- Cas：87644-22-2 Molecular Formula：C17H20 Cl N5 O6 S