Photoresist Chemicals Benzenesulfonic acid, 4-[3-(1,3-dihydro-1,3-dioxo-2H-isoindol-2-yl)-4,5-dihydro-5-oxo-1H-pyr azol-1-yl]- Cas:94705-33-6 Molecular Formula:C17H11N3O6S