Photoresist Chemicals Benzenesulfonic acid, 5-[(5,6-difluoro-4-pyrimidinyl)amino]-2-[[4,5-dihydro-3-methyl-5-oxo-1-(4 -sulfophenyl)-1H-pyrazol-4-yl]azo]- Cas:488153-77-1 Molecular Formula:C20H15F2N7O7S2