Photoresist Chemicals Benzoic acid, 2-fluoro-5-[2-methyl-1-[(1R,3S)-3-(1-methylethyl)-3-[[6-(trifluoromethyl)-2 H-1,3-benzoxazin-3(4H)-yl]carbonyl]cyclopentyl]-4-piperidinyl]- Cas:881493-09-0 Molecular Formula:C31H36F4N2O4