Photoresist Chemicals Benzoic acid, 3-[1,2,3,6-tetrahydro-1-[(1R,3S)-3-(1-methylethyl)-3-[[6-(trifluoromethyl)- 2H-1,3-benzoxazin-3(4H)-yl]carbonyl]cyclopentyl]-4-pyridinyl]-, methyl ester Cas:782492-40-4 Molecular Formula:C31H35F3N2O4